This course focuses on the design, fabrication, and application of microsystems providing a unique opportunity for interdisciplinary interactions.
MEMS technology is at the forefront of modern science and engineering of sensors, actuators, and other miniature devices. With the development of microfabrication technologies and facilities at Virginia Tech, it is natural that we become involved in this state-of-the-art research. This course will prepare students with the necessary background to allow them to participate in advanced processing laboratory and advanced MEMS design and microfabrication courses and also to pursue research in various aspects of microsystems development.
Prerequisites: 4234 or BCHM 4124 or CHE 4114 or CHEM 4124 or ESM 4014 or ESM 4024 or ME 4304 or ME 4404 or MSE 4254 or MSE 4354. Graduate Standing
This is an interdisciplinary course that is an introduction to the field of MEMS processing and technology. The objective is to attract early graduate students from a wide range of fields such as biology, chemistry, chemical engineering, electrical and computer engineering, materials science, and mechanical engineering. The 4000-level courses listed are all relevant to MEMS technology. It is recognized that students will bring a wide range of skills such as those found in the prerequisite list; all will be able to participate in various valuable ways to the course. Graduate standing will ensure a level of maturity necessary to integrated concepts across multiple disciplines. Missing materials for all students will be properly covered to assure that all students leave the course with an appropriate level of understanding of microsystems to be able to take more advanced courses offered by the various departments involved in nanoscience and technology.
Percentage of Course
|Wafer bonding and packaging||10%|
|CAD tools for MEMS||10%|