Burress hall at Virginia Tech including some pictures of MEMS devices and MICRON clean room facilitie

Publications

Journal Articles

  1. M. Nikkhah, J. S. Strobl, R. De Vita, and M. Agah, “The Cytoskeletal Organization of Breast Carcinoma and Fibroblast Cells Inside Three Dimensional (3-D) Isotropic Silicon Microstructures”, Biomaterials, (In press).

  2. P. Zellner, L. Renaghan, Z. Hasnain, and  M. Agah, “A fabrication Technology for Three-Dimensional Micro Total Analysis Systems”, Journal of Micromechanics and Microengineering, (In press).

  3. S. Narayanan, M. Nikkhah, J. S. Strobl and M. Agah, "Analysis of the Passivation Layer by Testing and Modeling a Cell-Impedance Micro-Sensor", Sensors and Actuators A, Physical, (In press).

  4. B. Alfeeli, L. T. Taylor, and M. Agah, "Evaluation of Tenax TA Thin Films as Adsorbent Material for Micro Preconcentration Applications," Microchemical Journal, (In press).

  5. M. A. Zareian-Jahromi, and M. Agah, "Microfabricated Gas Chromatography Columns with Mono-Layer Protected Gold Stationary Phases," IEEE/ASME Journal of Microelectromech. Systems, (In press).

  6. S. Ali, M. Ashraf-Khorassani, L. T. Taylor, and M. Agah, "MEMS-based Semi-Packed Gas Chromatography Columns," Sensors and Actuators B, Chemical, Vol. 141, No. 1, 2009, pp. 309-315.

  7. B. Alfeeli and M. Agah, "MEMS-based Selective Preconcentration of Trace Level Breath Analytes," IEEE Sensors Journal, Vol. 9, No. 9, 2009, pp. 1068-1075.

  8. M. Nikkhah, J. S. Strobl, B. Peddi and M. Agah, “Cytoskeletal Role in Differential Adhesion Patterns of Normal Fibroblasts and Breast Cancer Cells inside Silicon Microenvironments,” Biomedical Microdevices, Vol. 1, No. 3, 2009. 

  9. M. Nikkhah, J. S. Strobl and M. Agah, “Attachment and Response of Fibroblast and Human Breast Cancer Cells to Isotropic Silicon Microstructures of Different Geometries,” Biomedical Microdevices, Vol. 11, No. 2, 2009, pp. 429-441.

  10. M. A. Zareian-Jahromi, M. Ashraf-Khorassani, L. T. Taylor, and M. Agah, "Design, Modeling and Fabrication of MEMS-Based Multicapillary Gas Chromatography Columns," IEEE/ASME Journal of Microelectromech. Systems, Vol. 18, No. 1, 2009, pp. 28-37.

  11. B. Alfeeli, D. Cho, M. Ashraf-Khorassani, L. T. Taylor, and M. Agah, "MEMS-Based Multi-Inlet/Outlet Preconcentrator Coated by Inkjet Printing of Polymer Adsorbents," Sensors and Actuators B, Chemical, Vol. 133, No. 1, 2008, pp. 24-32.

  12. K. Gantz, L. Renaghan, and M. Agah, "Development of a comprehensive model for RIE-lag-based three-dimensional microchannel fabrication," Journal of Micromechanics and Microengineering, Vol. 18, 2008.

  13. S. Reidy, D. George, M. Agah, and R. Sacks, "Temperature-programmed GC using silicon microfabricated columns with integrated heaters and temperature sensors," Analytical Chemistry, Vol. 79, 2007, pp. 2911-2917.

  14. M. Agah and K. D. Wise, “Low-Mass PECVD Oxynitride Gas Chromatographic Columns,” IEEE/ASME J. Microelectromech. Systems, Vol. 16, No. 4, 2007, pp.853-860.

  15. M. Agah, G. R. Lambertus, R. D. Sacks, and K. D. Wise, “High-Speed MEMS-Based Gas Chromatography,” IEEE/ASME J. Microelectromech. Systems, Vol. 15, No. 5, 2006, pp. 1371-1378.

  16. M. Agah, J. A. Potkay, G. R. Lambertus, R. D. Sacks, and K. D. Wise, “High-performance Temperature-Programmed Microfabricated Gas Chromatography Columns,” IEEE/ASME J. Microelectromech. Systems, Vol. 14, No. 5, 2005, pp. 1039-1050.

  17. Chia-Jung Lu, William H. Steinecker, Wei-Cheng Tian, Masoud Agah, Joseph A. Potkay, Michael C. Oborny, Jamie Nichols, Helena Chan, Jeffrey Driscoll, Richard D. Sacks, Stella W. Pang, Kensall D. Wise, Edward T. Zellers, “First Generation Hybrid MEMS Gas Chromatograph,” Lab On A Chip, Vol. 5, 2005, pp. 1123-1131.

  18. G. Lambertus, A. Elstro, K. Sensenig, J. Potkay, M. Agah, S. Scheuering, K. Wise, F. Dorman, and R. Sacks, “Design, Fabrication and Evaluation of Microfabricated Columns for Gas Chromatography,” Analytical Chemistry, Vol. 76, 2004, pp. 2629-2637.

Conference Papers

  1. B. Alfeeli and M. Agah, "Low Pressure Drop Micro Preconcentrators with a Cobweb Tenax-TA Film," North American Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head '10), Hilton Head Island, SC, June 6-10, 2010, (To be presented).

  2. M. Nikkhah, J. S. Strobl, and M. Agah, “MicroPattern Effect on Breast Cancer Cells Behavior on Isotropically Etched Silicon Microenvironments” ASME NEMB 2010 Conference, February 7-10, Houston Texas, paper# 13030.

  3. J. S. Strobl, M. Nikkhah, R. Rhoades, and M. Agah, “Effects of an Experimental Drug, Suberoylanilidehydroxamic acid (SAHA), on Attachment, Spreading, and Stiffness of Human Breast Cancer Cells on Silicon Substrates” ASME NEMB 2010 Conference, February 7-10, Houston Texas, paper# 13037.

  4. M.Nikkhah, J. S. Strobl, and M. Agah, “Differentiating the Biomechanics of Normal and Diseased Cells Using Isotropically Etched Silicon Microstructures and Atomic Force Microcopy”, 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS '09), Jeju, Korea, October 18-23, 2009.

  5. B. Alfeeli, M. A. Zareian-Jahromi, and M. Agah, "Micro Preconcentrator with Seedless Electroplated Gold As Self-Heating Adsorbent," 8th IEEE Conference on Sensors (Sensors '09), Chirstchurch, New Zealand, October 25-28, 2009, pp. 1947-1950.

  6. S. Narayanan, M. Nikkhah, J. S. Strobl, and M. Agah, "Method to Quantify the Effect of Passivation Layer in Bio-Impedance Sensors" 31st Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC'09), Minneapolis, MN, September 2-6, 2009, pp. 3783-3786.

  7. B. Alfeeli, M. A. Zareian-Jahromi, and M. Agah, "Selective Micro Preconcentration of Propofol for Anesthetic Depth Monitoring by Using Seedless Electroplated Gold As Adsorbent" 31st Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC'09), Minneapolis, MN, September 2-6, 2009, pp. 2763-2766.

  8. P. Zellner, L. Renaghan, and M. Agah, "CMOS-Compatible Three Dimensional Buried Channel Technology," 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '09), Denver, CO, June 21-25, 2009, pp. 192-195.

  9. B. Alfeeli and M. Agah, "Selective Preconcentration by Temperature Manipulation of Cascaded Micro Preconcentrators," 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '09), Denver, CO, June 21-25, 2009, pp. 1662-1665.

  10. M. A. Zareian-Jahromi and M. Agah, "Self-Patterned Seedless Gold Electroplating in High-aspect-ratio Channels for GC Application," 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '09), Denver, CO, June 21-25, 2009, 160-163.

  11. M. Nikkhah, S. Narayanan, J. S. Strobl, and M. Agah, “Effect of Passivation Layer on Real Time Impedance Analysis of Mammalian Cells,” 5th International Conference on Microtechnology in Medicine and Biology (MMB '09), Quebec, Canada, April 1-3, 2009, pp. 140-141.

  12. P. Zellner, H. Shafiee, M. Sano, R. Davalos, and M. Agah, “An Insulator-based Dielectrophoresis Silicon Microchip for Particle Trapping,” 5th International Conference on Microtechnologies in Medicine and Biology (MMB '09), Quebec, Canada, April 1-3, 2009, pp. 76-77.

  13. M. A. Zareian-Jahromi and M. Agah, "Micro Gas Chromatography Multicapillary Columns with Mono-Layer Protected Gold as a Stationary," 22nd Annual IEEE Conference on Micro Electro Mechanical Systems (MEMS '09), Sorrento, Italy, January 25-29, 2009, pp. 288-291.

  14. M. Nikkhah, J. S. Strobl, and M. Agah “Study the Effect of Anticancer Drugs on Human Breast Cancer Cells Using Three Dimensional Silicon Microstructures,” ASME International Mechanical Engineering Congress and Exposition (IMECE), Boston, MA, Oct. 31-Nov. 6, 2008, paper# 66680.

  15. B. Alfeeli and M. Agah, "Micro Preconcentrator with Embedded 3D Pillars for Breath Analysis Applications," 7th IEEE Conference on Sensors (Sensors '08), Lecce, Italy October 26-29, 2008,  pp. 736-739.

  16. B. Alfeeli, S. Ali, V. Jain, R. Montazami, J. Heflin, and M. Agah, "MEMS-Based Gas Chromatography Columns with Nano-Structured Stationary Phases," 7th IEEE Conference on Sensors (Sensors '08), Lecce, Italy October 26-29, 2008,  pp. 728-731.

  17. P. Zellner and M. Agah, "A Single Mask, Single-Etch Process For Constructing Three Dimensional Micro-Total Analytical Systems," 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS '08), San Diego, CA, October 12-16, 2008, pp. 345-347.

  18. M. Nikkhah, J. Strobl, A. Omotosho, and M. Agah, "Attachment and Growth Behavior of Metastatic Human Breast Cancer Cells in MEMS-Based Silicon Microenvironments," 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS '08), San Diego, CA, October 12-16, 2008, pp. 1819-1821.

  19. M. A. Zareian-Jahromi, M. Ashraf-Khorassani, L. T. Taylor, and M. Agah, "Design, Modeling and Fabrication of MEMS-Based Multicapillary Gas Chromatography Columns," North American Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head '08), Hilton Head Island, SC, June 1-5, 2008, pp. 256-259.

  20. B. Alfeeli, M. Ashraf-Khorassani, L. T. Taylor, and M. Agah, "Multi-Inlet/Outlet Preconcentrator With 3-D μ-Structures Coated By Inkjet Printing of Tenax TA," North American Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head '08), Hilton Head Island, SC, June 1-5, 2008, pp. 118-121.

  21. J. Strobl, M. Nikkhah, and M. Agah, “Application of microengineered silicon chips to the study of human metastatic breast cancer and responses to histone deacetylase inhibitors,” American Association for Cancer Research Special Conference on Advances in Breast Cancer Research: Genetics, Biology, and Clinical Applications, San Diego, CA, October 17-20, 2007.

  22. M. Nikkhah, J. Strobl, and M. Agah, “Geometry-Dependent Behavior of Fibroblast Cells in Three-Dimensional Silicon Microstructures,” 29th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC '07), Lyon, France, August 23-26, 2007, pp. 6077-6080.

  23. M. Nikkhah, J. Strobl, and M. Agah, “Fibroblast and Cancer Cell Behaviors in Three-Dimensional Silicon Microstructures,” 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS '07), Paris, France, Oct. 7-11, 2007, pp. 727-729.

  24. S. Ali, M. A. Zareian-Jahromi, M. Ashraf-Khorassani, L. T. Taylor, and M. Agah, “Semi-Packed Micro Gas Chromatography Columns,” 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS '07), Paris, France, Oct. 7-11, 2007, pp. 239-241.

  25. K. Gantz and M. Agah, “Predictable three-dimensional microfluidic channel fabrication in a single-mask process," Technical Digest of the 14th International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers '07), Lyon, France, June 10-14, 2007, pp. 755-758. 

  26. M. Agah and K. D. Wise, “PECVD-Oxynitride Gas Chromatographic Columns,” IEEE International Electron Devices Meeting (IEDM ‘05), Washington, DC, Dec. 5-7, 2005, pp. 311-314.

  27. M. Agah and K. D. Wise, “A Fully-Dry PECVD-Oxynitride Process for MicroGC Column Fabrication,” 18th Annual IEEE Conference on Micro Electro Mechanical Systems (MEMS '05), Miami, FL, 2005, pp. 774-777.

  28. M. Agah, G. R. Lambertus, R. D. Sacks, and K. D. Wise, “High-Speed MEMS-Based Gas Chromatography,” IEEE International Electron Devices Meeting (IEDM ’04), San Francisco, CA, Dec. 13-15, 2004, pp. 27-30.

  29. M. Agah, J. Potkay, A. Elstro, G. Lambertus, R. Sacks, and K. Wise,“A High-Performance Temperature-Programmed Gas Chromatography Column,” North American Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head '04), Hilton Head Island, SC, June 6-10, 2004, pp. 302-305.

  30. E.T. Zellers, W.H. Steinecker, G.R. Lambertus, M. Agah, C.-J. Lu, H.K. Chan, J.A. Potkay, M.C. Oborny, J. Nichols, A. Astle, H. Kim, M.P. Rowe, J. Kim, L.W. Da Silva, J. Zheng, J. Whiting, R.D. Sacks, S.W. Pang, M. Kaviany, P.L. Bergstrom, A.J. Matzger, J. Kurdak, L.P. Bernal, K. Najafi and K.D. Wise, “A Versatile MEMS Gas Chromatograph for Environmental Vapor Mixture Analysis,” (Invited) North American Solid-State Sensor, Actuator, and Microsystems Workshop (Hilton Head '04), Hilton Head Island, SC, June 6-10, 2004, pp. 61-66.

  31. C.-J. Lue, W.-C. Tian, W. H. Steinecker, A. Guyon, M. Agah, M. C. Oborny, R. D. Sacks, K. D. Wise, S. W. Pang, E. T. Zellers, “Functionally Integrated MEMS Micro Gas Chromatograph Subsystem,” Proceedings of the seventh International Conference on Micro Total Analysis Systems (MicroTAS '03), Squaw Valley, California, Oct. 5-9, 2003, pp. 411-415.

  32. M. Agah, J. A. Potkay, J. A. Driscoll, R. D. Sacks, M. Kaviany, and K. D. Wise, "Thermal Behavior of High-Performance Temperature-Programmed Microfabricated Gas Chromatography Columns," Technical Digest of the 12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '03), Boston, Massachusetts, June 8-12, 2003, pp. 1339-1342.

  33. J. A. Potkay, J. A. Driscoll, M. Agah, R. D. Sacks, and K. D. Wise, "A High-Performance Microfabricated Gas Chromatography Column," 16th Annual IEEE Conference on Micro Electro Mechanical Systems (MEMS '03), Kyoto, Japan, January 19-23, 2003, pp. 395-398.

Conference Abstracts

  1. B. Alfeeli, D. Moodie, and M. Agah, "Freeze-dry Deposition of Semi-crystalline Adsorbent Polymer for Chemical Micro Preconcentrators," Pittsburgh Conference on Analytical Chemistry and Applied Spectroscopy (PittCon '10), Orlando, FL, February 28 - March 5, 2010, 2775-9 P.

  2. M. Nikkhah, J. S. Strobl and M. Agah, "MEMS-Based Three Dimensional Silicon Microstructures for Cellular Analysis”, Poster, 2009 Biomedical Engineering Society (BMES) Annual Fall Meeting, October 2009, Pittsburg.

  3. V. Jain, R. Montazami, B. Alfeeli, S. Ali, J. R. Heflin, and M. Agah, "High Speed gas chromatography of MEMS-based columns and preconcentrators by layer-by-layer assembly," 238th American Chemical Society National Meeting, Washington, DC, August 16-20, 2009.

  4. V. Jain, R. Heflin, M. Agah, L. T. Taylor, M. Ashraf-Khorassani, B. Alfeeli, and S. Ali, "Fabrication of Open Tubular Gas Chromatography Columns and MEMS-based Preconcentrators by the Layer-by-layer Assembly Process," in Nanofunctional Materials, Nanostructures and Novel Devices for Biological and Chemical Detection, edited by C. Li, A. Zribi, L. Nagahara, M. Willander (Mater. Res. Soc. Symp. Proc. 951E, Warrendale, PA, 2007), E11.3

  5. J. S. Strobl, M. Nikkhah and M. Agah, "Application of Microengineered Silicon Chips to the Study of Human Metastatic Breast Dancer and Responses to Histone Deacetylase Inhibitors” American Association for Cancer Research Special Conference on Advances in Breast Cancer Research: Genetics, Biology, and Clinical Applications, October 17-20, 2007, San Diego, CA.

 VT MEMS LAB :: 475 Whittemore Hall, Department of Electrical and Computer Engineering, Virginia Tech, Blacksburg, VA, 24061

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