The Virginia Tech’s Microelectromechanical Systems Laboratory or simply VT MEMS Lab was established in 2005 by Prof. Masoud Agah. The lab resides within the Bradley Department of Electrical and Computer Engineering and is affiliated with the Department of Mechanical Engineering and the MicrON Research Group.

The current research at VT MEMS Lab centers on the development of CMOS-compatible three-dimensional silicon micromachining techniques, smart microchip coolers, micro gas analyzers for environmental and healthcare applications, and biochips for cancer diagnosis and cancer treatment monitoring. In addition, the lab is pursuing research to merge MEMS (top-down approach) and nanotechnology (bottom-up approach) in order to enhance the performance of the microsystems under development in our group.

Students working in our lab will gain hands-on experience in the design, fabrication, testing, and analysis of microsystems. In addition, graduate and undergraduate students will enhance their skills in working as a team and will gain experience in participating in an interdisciplinary research environment.
Students who are interested to learn more about microfabrication and microsystems development are advised to take ECE 4234 (Semiconductor Processing), ECE 5210 (MEMS from Fabrication to Application), and ESM 5764: Modeling MEMS and NEMS.